Predictive Simulation of Semiconductor Processing: Status and Challenges 2004 Edition Contributor(s): Dabrowski, Jarek (Editor), Weber, Eicke R. (Editor) |
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ISBN: 3540204814 ISBN-13: 9783540204817 Publisher: Springer
Binding Type: Hardcover Published: May 2004 Click for more in this series: Springer Materials Science |
Additional Information |
BISAC Categories: - Science | Physics - General - Science | Nanoscience - Technology & Engineering | Electronics - Semiconductors |
Dewey: 621.381 |
LCCN: 2004040690 |
Series: Springer Materials Science |
Physical Information: 1.5" H x 6.5" W x 9.7" L (2.35 lbs) 490 pages |
Features: Bibliography, Index |
Descriptions, Reviews, Etc. |
Publisher Description: Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. |
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